Fusion Science and Technology / Volume 55 / Number 3 / April 2009 / Pages 308-312
Technical Paper / Eighteenth Target Fabrication Specialists' Meeting
Microfabrication techniques, derived from the semiconductor industry, can be used to make a variety of useful mechanical components for targets. A selection of target components fabricated using deep-etched materials including supporting cooling arms for prototype cryogenic inertial confinement fusion targets, and stepped and graded density targets for materials dynamics experiments is described. Microfabrication enables cost-effective, simultaneous fabrication of multiple high-precision components with complex geometries.