The behavior of tritium on the surface of various piping materials is discussed considering the various mass transfer steps. It is observed in this study that the isotope exchange reaction between gaseous hydrogen in gas stream and surface water and transfer of hydrogen isotopes and water through surface layer formed on materials or pores are most effective when an oxide film layer is formed on a material surface such as stainless steel. The amount of tritium sorbed on the stainless steel is correlated and compared with that observed for copper or quartz. The memory effect observed for an ionization chamber having stainless steel electrodes is also compared with that having copper electrodes.