Implantation-driven permeation (IDP) behavior of deuterium implanted with low energy (100–1800 eV) into 304 stainless steel has been studied. The experimental results showed that steady state permeation fluxes of deuterium through 304 SS decreased significantly with increasing the D+ ion from 100 through 1000 eV, while those above 1000 eV little depended on the energy. The energy dependence of the permeation flux observed would be attributed to change of the rate-determining regime of the permeation process depending on the incident ion energy.