In 2014/2015 at the Omega laser facility, several experiments took place to calibrate the National Ignition Facility (NIF) X-ray spectrometer (NXS), which is used for high-resolution time-resolved spectroscopic experiments at NIF. The spectrometer allows experimentalists to measure the X-ray energy emitted from high-energy targets, which is used to understand key data such as mixing of materials in highly compressed fuel. The purpose of the experiments at Omega was to obtain information on the instrument performance and to deliver an absolute photometric calibration of the NXS before it was deployed at NIF. The X-ray emission sources fabricated for instrument calibration were 1-mm fused silica spheres with precisely known alloy composition coatings of Si/Ag/Mo, Ti/Cr/Ag, Cr/Ni/Zn, and Zn/Zr, which have emission in the 2- to 18-keV range. Critical to the spectrometer calibration is a known atomic composition of elements with low uncertainty for each calibration sphere. This paper discusses the setup, fabrication, and precision metrology of these spheres as well as some interesting findings on the ternary magnetron-sputtered alloy structure.