Erbium oxide (Er2O3) coating layer is one of the suitable coatings to realize an advanced breeding blanket system because it has high electrical resistivity and hydrogen permeation suppression effect. In order to enhance these properties of Er2O3 coating, it is necessary to form a thick coating layer with high crystallinity. The formation of a double stacked coating layer on an austenitic stainless steel 316 substrate using an intermediate layer (buffer layer) was investigated for the thicker and high crystallinity of Er2O3 coating formation. Yttrium oxide (Y2O3) and cerium oxide (CeO2) were selected as buffer layer between the Er2O3 layer and austenitic stainless steel 316 substrate due to their similar lattice constant to that of Er2O3 crystal. The texture and grain growth direction of Er2O3 was controlled by the Y2O3 and CeO2 buffer layer. However, the suppression effect of hydrogen permeation by the double stacked coating was smaller than that of the single layer coating due to the thin Er2O3 formation.