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Tin-Polymer Composite on a Rotating Drum as a High Repetition Rate Laser Target for Extreme Ultraviolet Generation

Yuzuri Yasuda, Qincui Gu, Keiji Nagai, Mitsuo Nakai, Takayoshi Norimatsu, Shinsuke Fujioka, Hiroaki Nishimura, Masahiro Nakatsuka

Fusion Science and Technology / Volume 49 / Number 4 / May 2006 / Pages 691-694

Technical Paper / Target Fabrication /

High repetition rate irradiation of a laser on target is necessary for practical operation of an extreme ultraviolet (EUV) light source. A rotating drum with a tin com posite film was fabr icat ed for this purpose. Uniformly tin-dispersed plastic film was prepared from hydroxypropyl cellulose (HPC) and tin source solution of SnCl4/ethanol/H2O. It was transparent in the visible to near infrared region. The film was coated on an aluminum rotating drum from HPC-Sn solution. When this solution was coated on aluminum rotating target drum directly, the drum was corroded. Therefore an alternative method was developed starting with tin(tertbutoxide) instead of SnCl4. The later solution was used for coating on aluminum rotating target drum directly.

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