Fusion Science and Technology / Volume 49 / Number 4 / May 2006 / Pages 691-694
Technical Paper / Target Fabrication
High repetition rate irradiation of a laser on target is necessary for practical operation of an extreme ultraviolet (EUV) light source. A rotating drum with a tin com posite film was fabr icat ed for this purpose. Uniformly tin-dispersed plastic film was prepared from hydroxypropyl cellulose (HPC) and tin source solution of SnCl4/ethanol/H2O. It was transparent in the visible to near infrared region. The film was coated on an aluminum rotating drum from HPC-Sn solution. When this solution was coated on aluminum rotating target drum directly, the drum was corroded. Therefore an alternative method was developed starting with tin(tertbutoxide) instead of SnCl4. The later solution was used for coating on aluminum rotating target drum directly.