An RF plasma source has been designed and constructed for a compact neutron generator. The generation of neutrons is based on the D-D/D-T fusion reactions, producing 2.5/14.1MeV neutrons, respectively. The neutron yield of this device depends on the density of D or T monoatomic beams, which can be extracted from low-pressure high-density plasma sources, especially RF-driven plasma sources, such as an ICP (inductively coupled plasma) or a Helicon plasma source. In this presentation, the design of an ICP source with mirror field has been performed arranging targets in coaxial geometry. Plasma targets without any solid target as well as solid targets are arranged in this design for the comparison study and the effects of the mirror field on the plasma properties will be evaluated.