TiN+TiC+TiN multiple films are deposited on the surface of 1Cr18Ni9Ti stainless steel by ion-beam assisted deposition technology. The characteristics of films are tested by XPS, SEM and XRD, which showed that the film are compact and uniform with a thickness of about 15μm, and have a good adherence with the substrate below 773 K. The diffraction peaks in the XRD patterns for TiC and TiN are broadened, implying that the multiple films are deposited on the surface of 1Cr18Ni9Ti stainless steel. Meanwhile, the C-H bonded CH4-appears in the infrared spectra of multiple films, suggesting that the CH4- is in a static state, so hydrogen atom cannot migrate from the site bonded with carbon to a neighboring site. The deuterium permeability in 1Cr18Ni9Ti stainless steel coated with multiple films is 2-3 orders of magnitude lower than that in pure 1Cr18Ni9Ti stainless steel substrate from 473 K to 773 K.