Development of "Punching-Out Target" to Generate Extreme Ultraviolet (EUV) Light

Several hundred tin dots with controlled size were easily fabricated on transparency film by using an inkjet printer with SnSO4 solution. A surface treatment using Tween 20 as the surfactant was necessary. The SnSO₄ was reduced to metallic tin with NaBH₄. The thickness of metallic tin was 25 nm for one throughput.