Tin-Polymer Composite on a Rotating Drum as a High Repetition Rate Laser Target for Extreme Ultraviolet Generation

High repetition rate irradiation of a laser on target is necessary for practical operation of an extreme ultraviolet (EUV) light source. A rotating drum with a tin com posite film was fabr icat ed for this purpose. Uniformly tin-dispersed plastic film was prepared from hydroxypropyl cellulose (HPC) and tin source solution of SnCl₄/ethanol/H₂O. It was transparent in the visible to near infrared region. The film was coated on an aluminum rotating drum from HPC-Sn solution. When this solution was coated on aluminum rotating target drum directly, the drum was corroded. Therefore an alternative method was developed starting with tin(tertbutoxide) instead of SnCl₄. The later solution was used for coating on aluminum rotating target drum directly.