Papers

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Effects of Temperature and Polarity on Plasma Electrolytic Process for Nitrogen Fixation

1:35–1:55PM EDT

Emily Gillmore (Univ. Illinois, Urbana-Champaign), Brandon Kamiyama (Univ. Illinois, Urbana-Champaign), Mohan Sankaran (Univ. Illinois, Urbana-Champaign)

Paper

Design and Fabrication of a High Aspect Ratio Sensor for Semiconductor Manufacturing Diagnostics

1:55–2:15PM EDT

Alexandra M. Peevy (NCSU), Natalie Coon (NCSU), Nathaniel T. Rogalski (NCSU), Tanjina Akter (NCSU)

Paper

Elastic Cross Section of Tin Ions in an Extreme Ultraviolet Lithography Source

2:15–2:35PM EDT

Jack Gerrity (Univ. Illinois, Urbana-Champaign), Nathan Bartlett (Univ. Illinois, Urbana-Champaign), David N. Ruzic (Univ. Illinois, Urbana-Champaign)

Paper

Analysis of Fluoroelastomer and Perfluoroelastomer Degradation in Various Plasma Conditions

2:35–2:55PM EDT

Collin W. Jeckell (University of Illinois), Nick Connolly (Univ. Illinois, Urbana-Champaign)

Paper