Laser trackers are widely used in product inspection in the manufacturing process of the vacuum vessel (VV) for the China Fusion Engineering Test Reactor (CFETR). Due to the influence of temperature change on the geometrical properties of metallic materials, temperature change seriously affects the measurement accuracy of the workpiece. Therefore, temperature compensation is important to reduce the measurement errors caused by temperature change. This study uses 1/32 VV mockups as the research object. According to the results of finite element analysis and the onsite measurement results of the 1/32 VV at different temperatures, a method of temperature compensation for the 1/32 VV at different temperatures is summarized.