In the rf-produced plasma, it will be a possible mechanism for the density clamping that the eigenmodes are formed in the axial direction. The higher frequency waves are effective for the higher density plasma production. On the conditions of such a saturation region, we observed clear increase of the density by using fast Alfvén wave with a frequency of tenth cyclotron higher harmonics at the midplane of the central cell. The increasing rate depends on the rf power. An increase of high energy ions is observed with the high frequency wave injection.