Regrowth in tritium desorption from type 316 stainless steel, copper and borosilicate glass was studied. It was found that the tritium, which was penetrated into materials by long term contact, could not be easily desorbed by a stream of nitrogen gas (dry, wet or 10 % H2) at room temperature. The ratio of the tritium amount desorbed from surface by each purging to the tritium concentration in the gaseous phase under the sorption /desorption equilibrium on the surface was found to be constant through the repeated desorption. The amount of tritium desorbed by each gas purging was found to decrease by repeated desorption.