Two types of stainless steel, SUS304L and YUS170, are investigated by means of Auger Electron Spectroscopy and Scanning Electron Spectroscopy in order to assess some of their surface properties. In this experiment the effect of atomic hydrogen exposure on the composition of the material surfaces and on the surface topography is examined. For the irradiation with atomic hydrogen at elevated temperatures (100 °C ∼ 400 °C) an effective carbon removal cross section, σ, is obtained. The value of σ is of the order of 10−22 m2 for SUS304L and 10−23 m2 for YUS170. The surface oxygen concentration shows no decrease during the irradiation. Sulphur enrichment is detected after heating the samples due to surface segregation. The SEM observations show topographical surface changes in the grain size and in the roughness after heating and exposure to atomic hydrogen.