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Microfabricated Deep-Etched Structures for ICF and Equation-of-State Targets

Robin Miles, Julie Hamilton, Jackie Crawford, Susan Ratti, Jim Trevino, Tim Graff, Cheryl Stockton, Chris Harvey

Fusion Science and Technology

Volume 55 / Number 3 / April 2009 / Pages 308-312


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Microfabrication techniques, derived from the semiconductor industry, can be used to make a variety of useful mechanical components for targets. A selection of target components fabricated using deep-etched materials including supporting cooling arms for prototype cryogenic inertial confinement fusion targets, and stepped and graded density targets for materials dynamics experiments is described. Microfabrication enables cost-effective, simultaneous fabrication of multiple high-precision components with complex geometries.

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