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Deposition and Characteristics of Chlorine-Doped Glow Discharge Polymer Films

Abbas Nikroo

Fusion Science and Technology

Volume 31 / Number 4 / July 1997 / Pages 431-434


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Shells coated with chlorine-doped polymers deposited in a plasma are needed for diagnostic purposes for the OMEGA experiment. We have deposited chlorine-doped plasma polymer films by using a number of different chlorinated hydrocarbons. Chlorine concentrations between ≤ 1 to ≈ 35 at.% were obtained. Several characteristics of Cl-GDP films such as color, stress, chlorine concentration homogeneity and thermal stability are discussed.

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