A thin gold layer is deposited as a liner on the interior of a uranium hohlraum to protect from oxidation of uranium. X-ray fluorescence (XRF) spectrometry was chosen as the liner thickness measurement method for its accuracy, speed, and ease of measurement. The process is noncontact and nondestructive. The thicknesses were determined using a micro-XRF spectrometer unit with analysis software. The accuracy of the measurements was verified against qualified standards. The method was used to accurately measure gold liner thicknesses of cylindrical hohlraums, and it gave initial promising results for measuring the thickness of a boron-doped gold layer when corrected for the gold atom fraction.