Plasma contamination due to the generation of impurity molecules has been studied by mass spectrometry and by visible emission spectroscopy in the Tokamak de Varennes. The dominant effects are carbon monoxide formation, which is correlated with the residual water vapor pressure in the vacuum chamber, and the formation of C1, C2, and C3 hydrocarbons. The measured molecular fluxes are sufficient to account for a large part of the plasma impurity content. Visible spectroscopy indicates that the plasma is significantly affected by these chemical impurity sources. The molecules appear to originate mainly from the stainless steel walls rather than from the graphite limiters.