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Development of "Punching-Out Target" to Generate Extreme Ultraviolet (EUV) Light

Yuzuri Yasuda, Keiji Nagai, Takayoshi Norimatsu, Shinsuke Fujioka, Hiroaki Nishimura, Katsunobu Nishihara, Yasukazu Izawa, Kunioki Mima

Fusion Science and Technology / Volume 51 / Number 4 / May 2007 / Pages 769-771

Technical Paper

Several hundred tin dots with controlled size were easily fabricated on transparency film by using an inkjet printer with SnSO4 solution. A surface treatment using Tween 20 as the surfactant was necessary. The SnSO4 was reduced to metallic tin with NaBH4. The thickness of metallic tin was 25 nm for one throughput.

 
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