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Home / Publications / Journals / Fusion Science and Technology / Volume 49 / Number 4 / Pages 686-690

Electrochemical Fabrication of Low Density Metal Foam with Mono-Dispersed-Sized Micro- and Submicro-Meter Pore

Keiji Nagai, Daisuke Wada, Mitsuo Nakai, Takayoshi Norimatsu

Fusion Science and Technology / Volume 49 / Number 4 / May 2006 / Pages 686-690

Technical Paper / Target Fabrication

This paper deals with the fabrication of low-density metal using micro-template and electrochemical plating techniques. Tin and gold foam films were demonstrated. For both cases, porous foam plating required 0.5 V negatively higher bias potential than that for conventional metal plating. The electric current density values for them are smaller than those for bulk metal plating. In spite of these differences, the coulomb efficiency was almost the same as those for bulk metal plating. The density was almost close to the rest of closed packing density; 23 % of bulk metal for gold and 20 % of bulk metal for tin. These low-density foams will be applied for extreme ultraviolet (EUV) generation or other application through laser produced plasma.

 
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